Microfacturing and nanotechnology 

 - New York  Springer  2006 
 - xxiii,468 p. 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9788181285058 
<br/><br/><label>Dewey Class. No.: </label>TBB D6,8:(X:89P) P6